2-size compatible automatic register coater/developer (coating/developing)
No need for setup changes, it's a dual-size wafer compatible device. Compatible with low to high viscosity resist! Equipment for any wafer size can be manufactured!
The product is equipped with spin coating, HMDS treatment, baking, and cooling functions. Since we handle everything from design to manufacturing and sales in-house, we have achieved low prices! We have a proven track record with a variety of chemicals including positive-negative resist, polyimide, SOG, wax, and silicone. We also have extensive experience in transporting various substrates such as Si (silicon), GaAs, InP, GaN, SiC, sapphire, and SiO2 (glass). We have numerous achievements in transporting thin substrates like GaAs (thickness 150um), InP (thickness 150um), and LT (thickness 120um)! 【Features】 ■ No setup change required, capable of processing wafers in 2 sizes. ■ Achieves low prices. ■ Capable of handling low to high viscosity (1.7cP to 10000cP). ■ Compatible with 2 to 12-inch wafers. ■ Automatic wafer size recognition. ■ Proven track record with a variety of chemicals. ■ Reduced footprint (space-saving). ■ Numerous options for resist reduction. ■ Lineup tailored to production volume. *For more details, please refer to the PDF document or feel free to contact us.
- Company：エイ・エス・エイ・ピイ
- Price：Other
